Measuring volume resistivity and surface resistivity of conductive materials using the four-point probe method
The four-point probe method can be used to measure volume resistivity, surface resistivity, and conductivity.
The four-point probe method is the four-terminal measurement using four-point array probes and with
It can be used to calculate volume resistivity and surface resistivity (sheet resistance). Four-point
probe resistivity measurement is made possible by the Resistance Meter
RM3545, four-point array probes, and PC application software.
・Hioki provides four-point array probes in two variants with probe spacing of 5.0 mm and 1.5 mm.
・Hioki provides two types of PC application software: for cuboid DUTs and for solid cylindrical DUTs.
・Measured parameters include volume resistivity, surface resistivity, and conductivity. Resistance values
can also be chosen as a reference value.
・The application displays RCF (Resistivity Correction Factor) calculated based on the entered DUT
dimensions and measurement position coordinates.
・The application provides convenient functionality of a probing position guide, a measurement history,
and outputting measurement results as a CSV file.
・Low resistance values are measured with basic accuracy of 0.006% and a maximum resolution of 0.01 μΩ
(as per the RM3545’s specifications), allowing volume resistivity to be calculated with a high degree of