How to use the SM9002 Verification Fixture for Surface Resistance Measurement
QPlease advise on how to use the SM9002 Verification Fixture for Surface Resistance Measurement (option for the SM9001).
The SM9002 is an option used to verify the function and pre-inspection of the SM9001 Surface/Volume Resistance Measurement Electrode.
It has a 500k-ohm and 1T-ohm standard surface resistance in the front and back of the device, respectively.
1) Connect the short bar of the SM9001 to the Rs terminal and set the SM9001 on the SM9002's test surface.
2) For low resistance inspection
Set the SM9002 to low resistance surface (500k-ohm), and apply 10V. Read the value after about 15 seconds. Then, stop applying the voltage and repeat the same until the SM9002 has been rotated through 360 degrees (4 measurements in total).
Verification passes if the resistance falls within 500k-ohm +/-5%.
3) For high resistance inspectoin
Flip over the SM9002 to test high resistance (1T-ohm).
Apply 100V and confirm the resistance value becomes stable at 1 T-ohm +/-5%.
Use the resistance measurement mode when using it with the SM7110 and SM7120.
The other modes are not able to display the resistance value correctly.