FLYING PROBE TESTER FA1823
Enabling Reliable 4-wire Testing of Ultra-Fine Pads on Advanced IC Substrates
NEW
The Flying Probe Tester FA1823 offers high-precision probing on ultra-fine pads as small as φ19 µm, and for the first time in the industry — enables 4-wire low-resistance (Kelvin) measurements on pads of this scale.
By addressing key challenges in R&D, quality assurance, and mass production, the FA1823 significantly enhances inspection yield and long-term reliability in IC package substrate manufacturing.
Key Features
- High-precision probing on φ19 µm pads
- Industry-first 4-wire measurements on ultra-fine pads
- Streamlined probe replacement and maintenance
Model No. (Order Code)
| FA1823 | Horizontal double-sided type, with board-carrier |
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Specifications Overview
| Number of arms | 4 (2 each, top and bottom) | |
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| Compatible probes | 1172 series, CP1072 series, CP1073 series | |
| Number of test steps | Max. 999,999 steps | |
| Test parameters and measurement ranges | DC constant-current continuity measurement | 400.0 mΩ to 1.000 kΩ |
| DC constant-current resistance measurement | 40.00 µΩ to 400.0 kΩ | |
| DC constant-voltage resistance measurement | 4.000 Ω to 40.00 MΩ | |
| Insulation resistance measurement | 1.000 kΩ to 100.0 GΩ | |
| Low voltage insulation resistance measurement | 1.000 MΩ to 100.0 GΩ | |
| AC constant-voltage capacitance measurement | 100.0 fF to 10.00 µF | |
| Leakage current measurement | 1.000 µA to 10.00 mA | |
| High-voltage resistance measurement | 1.000 kΩ to 100.0 GΩ | |
| Capacitor insulation measurement | 1.000 kΩ to 10.00 MΩ | |
| Open measurement | 4.000 Ω to 4.000 MΩ | |
| Short measurement | 400.0 mΩ to 40.00 kΩ | |
| Test parameters and measurement for component-embedded board tests | LSI connection test | 0.000 V to 12.00 V |
| AC constant-voltage resistance measurement | 10.00 Ω to 100.0 kΩ | |
| AC constant-voltage capacitance measurement | 10.00 pF to 100.0 µF | |
| AC constant-voltage inductance measurement | 1.000 µH to 1.000 mH | |
| Judgment range | -99.9% to +999.9% or absolute value | |
| Movement resolution | XYZ: 0.1 µm/pulse | |
| Minimum pad pitch | 24 μm (with the CP1073-01, both the top and bottom) | |
| Minimum pad size | 1 μm (with the CP1075-09, both the top and bottom) | |
| Measurement speed | Max. 76 points/sec. (0.15 mm movements, 4-arm simultaneous probing, capacitance measurement) | |
| Testable board size | Thickness : 0.5 mm (0.02 in.) to 7.0 mm (0.28 in.) Outer dimensions : 50 mm (1.97 in.) W × 50 mm (1.97 in.) D to 280 mm (11.02 in.) W × 260 mm (10.24 in.) D |
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| Maximum testable area | 280 mm (11.02 in.) W × 260 mm (10.24 in.) D | |
| Clamp method | Board two-edge holding method | |
| Air requirements | Primary-side pressure: 0.5 MPa to 0.99 MPa (dry air) Maximum consumption: 10 L/min. (ANR) |
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| Power supply | 200 V, 220 V, 230 V, 240 V AC single-phase (specified at time of order); 50/60 Hz; maximum power consumption: 5 kVA |
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| Dimensions and weight | 1355 mm (53.35 in.) W × 1200 mm (47.24 in.) H × 1265mm (49.8 in.) D (excluding protruding parts) 1600 kg (56438 oz.) |
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